SECS/GEM, GEM300 and EDA for Semiconductor and Photovoltaic

• E4 SECS I
• E5 SECS II 
• E30 GEM
• E37 HSMS
• Documentation
• E167 Specification for Equipment Energy Saving Mode Communications (EESM)

SECS/GEM is a group of communication standards developed by Semiconductor Equipment and Materials International (SEMI). SECS is an abbreviation for SEMI Equipment Communication Standard. GEM stands for Generic Equipment Model and refers to the E30 SEMI-connectivity standard and defines a generic model for communication and control of production equipment. SECS/GEM provides a uniform interface for communication between automated equipment and the host. The communication standard was developed primarily for the semiconductor industry, but is also used in PCB and LED, flat panel and OLED factories.

The SECS protocol architecture consists of several layers. The first SECS layer is based on the RS232 interface (SEMI E4) or the TCP socket (SEMI E37). The higher SECS I and HSMS level is primarily responsible for connection management between host and equipment. The SECS II (SEMI E5) and GEM (SEMI E30) protocols for data exchange using standardized messages are located at the upper hierarchy levels. This layer model enables the machine to provide the host with information such as status and data variables, events, and alarms. The manufacturing execution system (MES) can use this information to monitor production, adjust the parameters if necessary and provide management with useful information using the monitoring function.

• E39 Object Service
• E40 Processing Management
• E87 Carrier Management
• E90 Substrate Tracking
• E94 Control Job Management
• E116 Equipment Performance Tracking

While the SECS/GEM standards are used for factories with a low degree of automation, high-end production, including automated material transport within the factory (e.g. AGV or OHT), requires further standardization in accordance with GEM300 standards. These are based on SECS/GEM standards and are used, for example, for detailed tracking and approval of carriers and individual substrates (SEMI E87) or for differentiating control jobs (SEMI E94) and process jobs (SEMI E40), with the control jobs assigning individual substrates to process jobs that involve different recipes. The individual substrates within the machine are tracked in detail (SEMI E90). In addition, detailed performance monitoring of the machine with all its modules is possible (SEMI E116). This ensures full control over the production at all times.

• E120 Common Equipment Model
• E125 Equipment Self Description
• E128 Specification for XML Message Structures
• E132 Authentication and Authorization
• E134 Data Collection Management
• E138 Semiconductor Common Components
• E145 Classification for Measurement Unit Symbols in XML

EDA (Equipment Data Acquisition), also known as Interface A, is an additional interface standard in the semiconductor industry that combines various SEMI standards. Modern semiconductor factories need high volumes of equipment and process data to optimize production. EDA was developed to collect data from the equipment. In contrast to a bidirectional SECS/GEM interface, which also makes it possible to control an equipment, EDA focuses exclusively on providing high volumes of data. EDA therefore represents a second machine interface in addition to SECS/GEM or GEM300. The collected data forms the basis for optimizations, which can be implemented with AI tools, for example. 

• Guide for PV Equipment Communication Interfaces (PVECI)

PV2 standard specifies a uniform IT interface for production equipment in the photovoltaic industry. The standard is largely based on the established framework of SECS/GEM norms and has been adapted to the specific needs of the industry. This promotes the use of powerful software systems in the area of factory control and management. SEMI PV2 enables factory IT systems such as manufacturing execution systems (MES) to access production machines and adjust their process parameters. In addition, the uniform interface provides, among other things, measurement, process and performance data for the machines. 

• A3-0819 Specification for Printed Circuit Board Equipment Communication Interfaces (PCBECI)

In 2019, SEMI A3-0819 Specification for Printed Circuit Board Equipment Communication Interfaces (PCBECI) standard was published by SEMI. The SEMI A3 standard is an industry-specific adaptation of SECS/GEM standards to electronics manufacturing and describes a standard interface in PCB manufacturing for bidirectional communication between machine and host. In order to simplify data management, some SECS/GEM functionalities have been limited. SEMI A3-0819 therefore offers a robust, comprehensive and expandable standard for shop floor communication.