SEMI E116

Specification for Equipment Performance Tracking

This standard introduces basic equipment performance tracking and reporting of basic equipment states like uptime vs. downtime over the whole equipment or module based (e.g. process chambers, load ports, robots).

Possible equipment states are:

  • IDLE – ready and waiting for work
  • BUSY – work in progress
  • BOCKED – Error occurred

This helps OEMs to improve their equipment with regard to throughput, hardware reliability and overall system performance while fabs can monitor whether their production performance targets are met.

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