Specification for Equipment Client Authentication and Authorization

This standard describes how secure Equipment Data Acquisition (EDA) communication can be established between the semiconductor production equipment and authorized clients. Authentication and authorization are crucial in this case. SEMI E132 provides basic guidelines to protect sensitive data and guarantee a secure production. It describes a client authentication mechanism to secure that only authorized users gain access to the production equipment data. Additionally, a flexible authorization scheme is provided, which enables machine manufacturers (OEMs) to manage the access categorized in different roles with specific rights. The scenario of simultaneous access requests by multiple clients is established as well.

Please note that EDA (“Interface A”) is a separate channel existing in parallel to a SECS communication channel used for SECS/GEM and GEM300. EDA is also does not required the use of SECS/GEM conform messaging (SEMI E5 and E30).