SEMI E145
Classification for Measurement Unit Symbols in XML
SEMI E145 defines XML structures for measurement units and measurement unit symbols, additionally providing a description how to add custom symbols and the rules for doing so.
Please note that EDA (“Interface A”) is a separate channel existing in parallel to a SECS communication channel used for SECS/GEM and GEM300. EDA is also does not required the use of SECS/GEM conform messaging (SEMI E5 and E30).