SEMI E138
Specification for XML Semiconductor Common Components
This standard defines common XML elements that are similar across multiple standards. This includes Error, Data Types, Data Value Types and Units. It also offers a mapping for definitions between EDA and SECS-II Data Types.
Please note that EDA (“Interface A”) is a separate channel existing in parallel to a SECS communication channel used for SECS/GEM and GEM300. EDA is also does not required the use of SECS/GEM conform messaging (SEMI E5 and E30).