SEMI E138

This standard defines common XML elements that are similar across multiple standards. This includes Error, Data Types, Data Value Types and Units. It also offers a mapping for definitions between EDA and SECS-II Data Types. 

Please note that EDA (“Interface A”) is a separate channel existing in parallel to a SECS communication channel used for SECS/GEM and GEM300. EDA is also does not required the use of SECS/GEM conform messaging (SEMI E5 and E30).