SEMI E37
Specification for High-Speed SECS Message Services (HSMS) Generic Services
This standard defines an Ethernet (TCP/IP) communication handshake and transmission protocol to exchange SECS-II messages. The TCP/IP connection is used whenever faster communication is required. Ethernet (TCP/IP) is more commonly used today compared to the serial RS232 interface described in SEMI E4 (SECS-I). The HSMS communication via the industry standard TCP/IP enables equipment manufacturers (OEMs) to build semiconductor production equipment that can quickly and easily be integrated and communicate with the host.