SEMI E40
Specification for Processing Management
This SEMI standard is relevant for automated material processing using Process Jobs. Process Jobs tell, what material shall be processed by the equipment, the order in which the process steps shall be conducted and which recipes should be used. It is also possible to run jobs without material, e.g. a process chamber cleaning job following a defined recipe to prepare it for the actual process.
It provides concepts and behavior solutions and goes as deep to specify the messaging.
As soon as a Process Job is created, it can automatically be initiated as soon as the expected material arrives, or the commands (Start, Stop, Abort, Pause or Resume) can be issued by the host.
Job Management in GEM300 has two components: Process Jobs and Control Jobs. Control Job Management is specified in SEMI E94.