SEMI E128

This standard provides XML message structures to encode message header information and exchange EDA data between equipment and EDA clients like fab hosts. It describes the structure for data queries by the host and the expected structure of the equipment’s response.

Please note that EDA (“Interface A”) is a separate channel existing in parallel to a SECS communication channel used for SECS/GEM and GEM300. EDA is also does not required the use of SECS/GEM conform messaging (SEMI E5 and E30).