SEMI E125
Specification for Equipment Self Description (EqSD)
In addition to the self-describing Common Equipment Model (CEM), which enables the host clearly to see where the data is coming from and thus e.g. speeding up troubleshooting, SEMI E125 provides the means to equipment manufacturers to provide further data: Variables (parameters), exceptions (alarms) and essential events in reference to every single component in the equipment, may they be physical, logical, custom or established within a GEM300 standard (SEMI E40, SEMI E87, SEMI E90, SEMI E94).SEMI E125 only refers to static information.