SEMI E125

Specification for Equipment Self Description (EqSD)

Wafer

In addition to the self-describing Common Equipment Model (CEM), which enables the host clearly to see where the data is coming from and thus e.g. speeding up troubleshooting, SEMI E125 provides the means to equipment manufacturers to provide further data: Variables (parameters), exceptions (alarms) and essential events in reference to every single component in the equipment, may they be physical, logical, custom or established within a GEM300 standard (SEMI E40, SEMI E87, SEMI E90, SEMI E94).SEMI E125 only refers to static information. 

Would you like to learn more about how you can implement SEMI standards? Send us a message and we will get back to you as soon as possible.
 

Roman Olwig Senior Sales Manager Kontron AIS GmbH
Roman Olwig
Senior Sales Manager
Connectivity, Integration and Rail Automation