SEMI E172
Specification for SECS Equipment Data Dictionary (SEDD)
This standard gives instructions for consistently defining key elements of a SECS-II interface in a standardized XML document. This documentation is called “SECS Equipment Data Dictionary (SEDD)”. SEMI E172 provides an XSD schema that specifies the document structure for the following information regarding the equipment:
- Equipment meta information: e.g. equipment model number, equipment ID, supplier
SECS/GEM functionalities:
- status variables
- data variables
- variable formats
- equipment constants
- collection events
- alarms and recipe variable parameters (tuning parameters)
- supported stream functions and SEMI standards with their compliance statements
The documentation shall be understandable for humans as well as usable by software applications.
Semiconductor factory integration teams use this documentation as a basis for their software, which communicates with the equipment. This standardized representation of shared data streamlines the software development process for the factory and speeds up the integration of the equipment.
This is an additional documentation beyond the set documentation scope for the SEMI-compliant SECS/GEM, GEM300 or EDA interface.