SEMI E120
Specification for the Common Equipment Model (CEM)
This EDA (Equipment Data Acquisition) standard provides object model rules for consistent structure of all equipment components, supporting the efficient communication with the host. This includes e.g. classes, attributes, relationships relevant for and known to the fab host application. A basic model is described and can be extended during project realization.
Physical equipment modules like load ports, process chambers or sensors are classified as Modules, Subsystems and IO devices, while logical elements are software modules running on the equipment, e.g. recipe managers or schedulers.
Please note that EDA (“Interface A”) is a separate channel existing in parallel to a SECS communication channel used for SECS/GEM and GEM300. EDA is also does not required the use of SECS/GEM conform messaging (SEMI E5 and E30).