SEMI E90
Specification for Substrate Tracking
Substrate Management can be understood as material management. After being successfully moved to the equipment, the substrates must be tracked within the tool. This includes the paths they take on their way moving through the equipment.
Substrate tracking is on the host side, the equipment control is responsible to provide information about substrates while they are moving through the production equipment. This standard defines the range of information services supported by the equipment and explains concepts and behaviors of substrates, substrate locations, batches and batch locations. Based on the information on singular substrates, the host is able to determine their processing state.