SEMI E160

In order to use equipment data to improve productivity, the quality of equipment data that are delivered has to be ensured. This standard helps in:

• defining metrics to communicate the quality of data generated by the semiconductor equipment
• communicating the quality of selected data parameters
• setting up measurable data quality to enable high quality service and application performance for equipment suppliers, chip manufacturers and equipment control suppliers
• providing methods to ensure compliance in data reporting

The quality of data refers to any data that can be obtained from the semiconductor production equipment via electronic interfaces. Data quality metrics provide a way to quantify specific data quality attributes or elements, enabling their communication and verification. This standard defines metrics aligned with the aspects, attributes, and Elements of data quality as outlined in SEMI E151 (Guide for Understanding Data Quality).

As data quality is a comprehensive topic, a large number of underlying SEMI standards are referenced:

• SECS/GEM: SEMI E5, E30, E37
• EDA (Interface A): SEMI E125, E134, E138, E145
• SEMI E151 – Guide for Understanding Data Quality
• SEMI E54 – Sensor/Actuator Network