SECS/GEM is an international SEMI standard that standardizes communication between manufacturing equipment and host systems in semiconductor industry. It enables remote control, data exchange, and alarm messages—and forms the base for the efficient integration of machines in modern semiconductor fabs.
What is SECS/GEM?
The SEMI SECS/GEM standards form the basis for efficient system integration and are a combination of several SEMI standards. They include the following SEMI standards:
- E4 – Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
- E5 – Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
- E30 – Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
- E37 – Specification for High-Speed SECS Message Services (HSMS) Generic Services
- E167 - Specification for Equipment Energy Saving Mode Communications (EESM)
These layers ensure that data can be transferred and evaluated in a standardized manner.

- The first layer is the communication protocol. While RS-232 communication (SEMI E4 - SECS-I) used to be sufficient, it is now common to use the faster TCP/IP connection (SEMI E37 - HSMS).
- The second layer, SEMI E5 - SECS-II, describes the structure and content of the messages to be transmitted. These messages, referred to as “functions,” are grouped into “streams” according to their purpose (e.g., job management).
- The third layer is the General Equipment Models (GEM). It provides the fab host with information and describes the expected behavior and capabilities of the equipment and the host/MES (SEMI E30). This includes, for example: remote control, output of data, alarms, and events, process program management (PPM), and state models.
Why is SECS/GEM important?
The SECS/GEM standard plays a key role in semiconductor manufacturing worldwide. It provides a standardized interface that allows equipment and host systems to communicate with each other uniformly, regardless of the manufacturer. This reduces integration costs and enables faster production readiness in semiconductor factories.
In addition, SECS/GEM enables a high degree of automation. Functions such as remote control, continuous data logging, and reliable process monitoring ensure that production processes can be controlled and monitored more efficiently.
SECS/GEM forms the base for advanced standards such as GEM300, which are indispensable in modern, fully automated semiconductor fabs. SECS/GEM thus forms the basis for integration into a future-proof production environment.
Benefits for equipment manufacturers (OEMs) and operators
The SECS/GEM standard offers decisive advantages for semiconductor manufacturing. It enables faster integration of new equipment into existing production environments, thereby reducing commissioning costs. At the same time, the interface allows for easy expansion with additional functions, so that equipment can be flexibly adapted to new requirements. SECS/GEM also contributes to improved productivity: processes can be controlled more efficiently, downtime is minimized, and idle times are significantly reduced.
As an internationally accepted interface, SECS/GEM is established worldwide at fabs and OEMs and forms the base for market entry and sustainable competitiveness in the semiconductor industry.
Implementation with FabLink®
Our SEMI interface solution, FabLink® interface software, supports the implementation of all relevant SECS/GEM standards and ensures that systems can be quickly and reliably integrated into existing production environments. FabLink® meets the requirements of fabs and OEMs in the global semiconductor market. Additional SEMI standards can be implemented on an individual base.
The integration of FabLink® offers clear advantages: short project durations and predictability thanks to calculable costs, fast commissioning with minimal downtime, and the configuration of follow-up projects, which can be carried out independently and directly by the OEM.
In addition to SECS/GEM, FabLink® offers solutions for GEM300 and EDA (Interface A).