SEMI E134

Specification for Data Collection Management

Based on the equipment self-description and the Common Equipment Model (CEM) it is possible for the EDA client to subscribe to the specific data of interest. To do so, this standard advises how to set up and manage Data Collection Plans (DCPs) without affecting equipment performance. By creating DCPs, EDA clients can obtain trace data or event-based data, for example data that are directly related to an occurring alarm. Equipment data may be continuously collected or requested as required.

Please note that EDA (“Interface A”) is a separate channel existing in parallel to a SECS communication channel used for SECS/GEM and GEM300. EDA is also does not required the use of SECS/GEM conform messaging (SEMI E5 and E30).