Results 211 to 220 of 300
SEMI E109 – Specification for Reticle and Pod Management (RPMS)
Need to meet SEMI requirements? We can help – get in touch now! SEMI E109 can be seen as a combination of SEMI E87 (Carrier Management) and SEMI E90 (Substrate Tracking) but dedicated to equipme
SEMI E116 – Specification for Equipment Performance Tracking
Back to the overview of SEMI standards Need to meet SEMI requirements? We can help – get in touch now! This standard introduces basic equipment performance tracking and reporting of basic equ
SEMI E120 – Specification for the Common Equipment Model (CEM)
Back to the overview of SEMI standards Need to meet SEMI requirements? We can help – get in touch now! This EDA (Equipment Data Acquisition) standard provides object model rules for consisten
SEMI E125 – Specification for Equipment Self Description (EqSD)
Back to the overview of SEMI standards Need to meet SEMI requirements? We can help – get in touch now! In addition to the self-describing Common Equipment Model (CEM), which enables the host
SEMI E127 Specification for Integrated Measurement Module Communications: Concepts, Behavior, and Services (IMMC)
Need to meet SEMI requirements? We can help – get in touch now! The SEMI E127 Standard has been originally published in 2003, the latest version is as of 2008. It has been marked as inactive.&nb
SEMI E128 – Specification for XML Message Structures
Back to the overview of SEMI standards Need to meet SEMI requirements? We can help – get in touch now! This standard provides XML message structures to encode message header information and e
SEMI E132 – Specification for Equipment Client Authentication and Authorization
Back to the overview of SEMI standards Need to meet SEMI requirements? We can help – get in touch now! This standard describes how secure Equipment Data Acquisition (EDA) communication can be
SEMI E134 – Specification for Data Collection Management
Back to the overview of SEMI standards Need to meet SEMI requirements? We can help – get in touch now! Based on the equipment self-description and the Common Equipment Model (CEM) it is possi
SEMI E138 – Specification for XML Semiconductor Common Components
Back to the overview of SEMI standards Need to meet SEMI requirements? We can help – get in touch now! This standard defines common XML elements that are similar across multiple standards. Th
SEMI E142 - Specification for Substrate Mapping
Need to meet SEMI requirements? We can help – get in touch now! This standard is a guideline for the method by which the host and the equipment exchange substrate map data via a SECS/GEM interfa