SEMI E167
Specification for Equipment Energy Saving Mode Communications (EESM)
This standard proposes concepts and message services supporting communication supporting a lower production equipment power consumption. This includes not only idle mode, but also sleep mode. The standard is based on SECS-II messaging. SEMI E167 does not recommend a specific communication protocol.
It gives a definition of Equipment Energy Saving Mode Communication behavior as a state model and specifies the message services and content that are essential in the fab-equipment communication to manage the Equipment Energy Saving Mode.