SEMI E142
Specification for Substrate Mapping
This standard is a guideline for the method by which the host and the equipment exchange substrate map data via a SECS/GEM interface, using common GEM event reports and Stream 14 messaging (SEMI E39 object requests).
Substrate maps can be required by an equipment before a process can be started, or can be generated by an equipment. They offer dedicated information regarding processing outcomes and analysis results for individual positions (e.g., units, cells, dies) on the substrate. Defined substrate types by SEMI E142 are wafers, frames, strips and trays.
The standard relates to assembly and packaging processes and includes the testing of semiconductor devices.
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Roman Olwig
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Connectivity, Integration and Rail Automation