SEMI E127
Specification for Integrated Measurement Module Communications: Concepts, Behavior, and Services (IMMC)
The SEMI E127 Standard has been originally published in 2003, the latest version is as of 2008. It has been marked as inactive.
This standard was aiming to enable metrology and inspection within the production equipment, reducing or eliminating the need to transfer substrates/wafers between production and test equipment. The purpose was to create an integrated measurement module with a standardized interface.
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Roman Olwig
Senior Sales Manager
Connectivity, Integration and Rail Automation