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SEMI E30 – Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)

ToolCommander® The open software framework for equipment control and visualization Back to the overview of SEMI standards Need to meet SEMI requirements? We can help – get in touch now! FabLi

SEMI E37 – Specification for High-Speed SECS Message Services (HSMS) Generic Services

Need to meet SEMI requirements? We can help – get in touch now! ToolCommander® The open software framework for equipment control and visualization Back to the overview of SEMI standards FabLi

SEMI E39 – Specification for Object Services: Concepts, Behavior, and Services

ToolCommander® The open software framework for equipment control and visualization Back to the overview of SEMI standards Need to meet SEMI requirements? We can help – get in touch now! FabLi

SEMI E4 – Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)

ToolCommander® The open software framework for equipment control and visualization Back to the overview of SEMI standards Need to meet SEMI requirements? We can help – get in touch now! FabLi

SEMI E40 - Specification for Processing Management

Back to the overview of SEMI standards Need to meet SEMI requirements? We can help – get in touch now! This SEMI standard is relevant for automated material processing using Process Jobs. Pro

SEMI E5 – Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)

ToolCommander® The open software framework for equipment control and visualization Back to the overview of SEMI standards Need to meet SEMI requirements? We can help – get in touch now! FabLi

SEMI E84 – Specification for Enhanced Carrier Handoff Parallel I/O Interface

Need to meet SEMI requirements? We can help – get in touch now! This standard describes the automated carrier handoff between a fab’s automated transport system (e.g. AMHS, AGV, RGV or OHT) and

SEMI E87 – Specification for Carrier Management (CMS)

Back to the overview of SEMI standards Need to meet SEMI requirements? We can help – get in touch now! Automated material management is crucial in a fully automated fab. This standard describ

SEMI E90 – Specification for Substrate Tracking

Back to the overview of SEMI standards Need to meet SEMI requirements? We can help – get in touch now! Substrate Management can be understood as material management. After being successfully

SEMI E94 – Specification for Control Job Management

ToolCommander® The open software framework for equipment control and visualization Back to the overview of SEMI standards Need to meet SEMI requirements? We can help – get in touch now! FabLi