Results 231 to 240 of 317
SEMI E120 – Specification for the Common Equipment Model (CEM)
Back to the overview of SEMI standards Need to meet SEMI requirements? We can help – get in touch now! This EDA (Equipment Data Acquisition) standard provides object model rules for…
SEMI E125 – Specification for Equipment Self Description (EqSD)
Back to the overview of SEMI standards Need to meet SEMI requirements? We can help – get in touch now! In addition to the self-describing Common Equipment Model (CEM), which enables the host…
SEMI E127 Specification for Integrated Measurement Module Communications: Concepts, Behavior, and Services (IMMC)
Need to meet SEMI requirements? We can help – get in touch now! The SEMI E127 Standard has been originally published in 2003, the latest version is as of 2008. It has been marked as…
SEMI E128 – Specification for XML Message Structures
Back to the overview of SEMI standards Need to meet SEMI requirements? We can help – get in touch now! This standard provides XML message structures to encode message header information and…
SEMI E132 – Specification for Equipment Client Authentication and Authorization
Back to the overview of SEMI standards Need to meet SEMI requirements? We can help – get in touch now! This standard describes how secure Equipment Data Acquisition (EDA) communication can…
SEMI E134 – Specification for Data Collection Management
Back to the overview of SEMI standards Need to meet SEMI requirements? We can help – get in touch now! Based on the equipment self-description and the Common Equipment Model (CEM) it is…
SEMI E138 – Specification for XML Semiconductor Common Components
Back to the overview of SEMI standards Need to meet SEMI requirements? We can help – get in touch now! This standard defines common XML elements that are similar across multiple standards.…
SEMI E142 - Specification for Substrate Mapping
Need to meet SEMI requirements? We can help – get in touch now! This standard is a guideline for the method by which the host and the equipment exchange substrate map data via a SECS/GEM…
SEMI E145 – Classification for Measurement Unit Symbols in XML
ToolCommander® The open software framework for equipment control and visualization Back to the overview of SEMI standards Need to meet SEMI requirements? We can help – get in touch…
SEMI E148 - Specification for Time Synchronization and Definition of the TS-Clock Object
Need to meet SEMI requirements? We can help – get in touch now! Accurate time synchronization is essential within a fab for collecting and analyzing processing data as well as enabling smooth…