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SEMI E120 – Specification for the Common Equipment Model (CEM)

Back to the overview of SEMI standards Need to meet SEMI requirements? We can help – get in touch now! This EDA (Equipment Data Acquisition) standard provides object model rules for consisten

SEMI E125 – Specification for Equipment Self Description (EqSD)

Back to the overview of SEMI standards Need to meet SEMI requirements? We can help – get in touch now! In addition to the self-describing Common Equipment Model (CEM), which enables the host

SEMI E127 Specification for Integrated Measurement Module Communications: Concepts, Behavior, and Services (IMMC)

Need to meet SEMI requirements? We can help – get in touch now! The SEMI E127 Standard has been originally published in 2003, the latest version is as of 2008. It has been marked as inactive.&nb

SEMI E128 – Specification for XML Message Structures

Back to the overview of SEMI standards Need to meet SEMI requirements? We can help – get in touch now! This standard provides XML message structures to encode message header information and e

SEMI E132 – Specification for Equipment Client Authentication and Authorization

Back to the overview of SEMI standards Need to meet SEMI requirements? We can help – get in touch now! This standard describes how secure Equipment Data Acquisition (EDA) communication can be

SEMI E134 – Specification for Data Collection Management

Back to the overview of SEMI standards Need to meet SEMI requirements? We can help – get in touch now! Based on the equipment self-description and the Common Equipment Model (CEM) it is possi

SEMI E138 – Specification for XML Semiconductor Common Components

Back to the overview of SEMI standards Need to meet SEMI requirements? We can help – get in touch now! This standard defines common XML elements that are similar across multiple standards. Th

SEMI E142 - Specification for Substrate Mapping

Need to meet SEMI requirements? We can help – get in touch now! This standard is a guideline for the method by which the host and the equipment exchange substrate map data via a SECS/GEM interfa

SEMI E145 – Classification for Measurement Unit Symbols in XML

ToolCommander® The open software framework for equipment control and visualization Back to the overview of SEMI standards Need to meet SEMI requirements? We can help – get in touch now! FabLi

SEMI E148 - Specification for Time Synchronization and Definition of the TS-Clock Object

Need to meet SEMI requirements? We can help – get in touch now! Accurate time synchronization is essential within a fab for collecting and analyzing processing data as well as enabling smooth wo