SEMI E84

This standard describes the automated carrier handoff between a fab’s automated transport system (e.g. AMHS, AGV, RGV or OHT) and the load port of the equipment with an optical parallel input/output (PIO).

The specification contains: 

• Definition of PIO signals, e.g. whether the equipment is ready for carrier handoff, which load port is to be used for carrier handoff, whether a carrier handoff is currently taking place or a carrier handoff has been completed.
• Description of the carrier handoff sequence with comprehensive illustrative diagrams for various scenarios and examples.
• Notes on possible errors, with explanations of how to detect and correct them.
• Definition of the physical interface, including pin assignment.