News / Press

BENEQ OY AND OUR TOOLCOMMANDER®

Beneq®’s first ALD (Atomic Layer Deposition) system with the Kontron AIS control framework ToolCommander® was commissioned at the end customer.

It has been pre-tested at Beneq® headquarters in Finland and in China the coating system is now being used in a cluster for the production of OLED microdisplays. In addition to the system control solution with the ToolCommander®, Kontron AIS was able to implement a tailor-made host integration protocol.

 

In this project, the ToolCommander® has once again proven its position as the control framework in the semiconductor industry and for thin-film applications. To implement the standard-compliant SECS/GEM interfaces, our FabLink can be used.

If you want to know more, you can find the complete Success Story here.